In wafer fabrication, even the smallest molecular defect or metallic impurity can compromise yield and performance.
At Intertek Allentown, we provide premier, full-service laboratory solutions to ensure the absolute purity of your chemicals, manufacturing environments, and gas distribution components.
Leveraging state-of-the-art instrumentation like ICP-MSQQQ and HR-ICP-MS, we offer direct injection of solvents and ultra-trace analysis of chemicals down to parts-per-trillion (ppt) levels. Using advanced surface measurement techniques such as profilometry and scanning electron microscopy (SEM) we detect surface defects or inconsistencies at the microscale and nanoscale.
Process Chemical Testing & Ultra-Trace Analysis
Our advanced analytical capabilities support a broad spectrum of liquid chemicals, ensuring they meet strict C8-12 grade materials requirements.
Covered Process Chemicals
- Acids: HF, HCl, HNO₃, H₂SO₄
- Bases: NH₄OH, TMAH, MEA
- Solvents: IPA, acetone, NMP, PGMEA, MEK, Ethyl Lactate and more
- Deionized (DI) Water and Extraction Solutions
- CMP Slurries
- Photoresist Chemicals
Core Liquid & Assay Testing Capabilities
| Methodology | Application / Target Impurities |
|---|---|
| ICP-MSQQQ & HR-ICP-MS | Ultra-trace elemental analysis (ppt levels) via direct solvent injection |
| Gas Chromatography (GC) | Solvent purity determination and assay analysis |
| Ion Chromatography (IC) | Ion impurity and organic acid analysis |
| Wet Chemistry & TOC | Total Organic Carbon monitoring and bulk properties testing |
| LC-MS | Identification and quantification of plasticizers |
| Single Particle ICP-MS | Detection and characterization of iron nanoparticles |
| SEM | Particle counts and particle size distribution |
Component, Surface & Contamination Analysis
Beyond liquid chemicals, we evaluate the critical physical components that come into direct contact with your process chemistry.
SEMI F73 Compliance Testing
We utilize Scanning Electron Microscopy (SEM) in strict accordance with SEMI F73 (Test Method for SEM Evaluation of Wetted Surface Condition of Stainless Steel Components).
This allows us to precisely determine:
- Surface defects on wetted surfaces
- Microscopic contaminants present on stainless steel components used in high-purity gas distribution systems
- Custom profiling and surface roughness evaluation. Contact our team to discuss your specific sample requirements.
Cleanroom Air Monitoring & Outgassing Analysis
Airborne and material-born molecular contamination (AMC) poses a massive risk to advanced nodes. We utilize Thermal Desorption GC-MS (TD-GC-MS) to isolate and quantify trace volatile and semi-volatile organic compounds.
Key Air & Material Application
- Material Outgassing Analysis: Evaluation of tubing, sealants, gaskets, plastics, and polymers to identify compounds that may deposit onto silicon wafer surfaces and cause structural defects.
- Wafer Surface Contamination: Identification of organic contaminants directly on wafer surfaces that can interfere with critical manufacturing steps.
- Cleanroom Air Monitoring: Continuous or periodic monitoring to identify and quantify trace concentration VOCs and SVOCs in cleanroom environments.
Seamless Logistics: Turnkey Sampling Media
To ensure sample integrity, Intertek Allentown provides a turnkey testing lifecycle. We ship specialized sampling media directly to your facility. Your team collects the samples on-site, returns the media to our laboratory, and our experts handle the rest, delivering rapid, precise, and actionable analytical data.
